The energy spectrum of sputtered atoms

Author:

Williams M. M. R.

Publisher

Informa UK Limited

Reference17 articles.

Cited by 13 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Transport theories of sputtering;Philosophical Transactions of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences;2003-11-25

2. Mechanisms and theory of physical sputtering by particle impact;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1987-06

3. Metal Properties;Mo Molybdenum;1987

4. Corrections to the collisional sputtering yield;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1986

5. The energy spectrum of sputtered atoms II;Philosophical Magazine A;1981-05

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