Patterned masking using polymers: insights and developments from silicon photovoltaics
Author:
Funder
Australian Research Council
Publisher
Informa UK Limited
Subject
Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials
Link
http://www.tandfonline.com/doi/pdf/10.1080/09506608.2016.1190160
Reference109 articles.
1. Lithography and Other Patterning Techniques for Future Electronics
2. The application of photolithography to the fabrication of microcircuits
3. Principles of Lithography
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