A review on microholes formation in glass-based substrates by electrochemical discharge drilling for MEMS applications
Author:
Affiliation:
1. Electrochemical Microfabrication Laboratory, Department of Mechanical Engineering, Indian Institute of Technology, Bombay, Mumbai, India
Funder
Ministry of Human Resources and Development
Department of Scientific and Industrial Research
Impacting Research Innovation and Technology
MHRD, Indian Government,
Publisher
Informa UK Limited
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering,General Materials Science
Link
https://www.tandfonline.com/doi/pdf/10.1080/10910344.2022.2044857
Reference163 articles.
1. Nature of drilling forces during spark assisted chemical engraving
2. Gas film formation time and gas film life time during electrochemical discharge phenomenon
3. Micro array hole formation in glass using electrochemical discharge machining
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