Computer calculations of sheet resistance of n- and p-type implantations in silicon
Author:
Affiliation:
1. a Electronics and Applied Physics Division , A.E.R.E. , Harwell, Didcot , Berkshire
Publisher
Informa UK Limited
Subject
General Engineering
Link
https://www.tandfonline.com/doi/pdf/10.1080/00337577208231198
Reference7 articles.
1. Resistivity of Bulk Silicon and of Diffused Layers in Silicon
2. Dearnaley , G. Proc. European Conf. Ion Implantation. pp.162Pub. Peter Pereginus Ltd.
3. Resistivity, mobility and impurity levels in GaAs, Ge, and Si at 300°K
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