Highly configurable capacitive interface circuit for tri‐axial MEMS microaccelerometer
Author:
Publisher
Informa UK Limited
Subject
Electrical and Electronic Engineering
Link
http://www.tandfonline.com/doi/pdf/10.1080/00207217.2011.651691
Reference14 articles.
1. Allen, JJ. (2009), ‘Micro‐System Inertial Sensing Technology Overview’, SANDIA REPORT SAND2009‐3080, Sandia National Laboratories
2. Micro-gravity capacitive silicon-on-insulator accelerometers
3. Ultra-Low-Power Interface Chip for Autonomous Capacitive Sensor Systems
4. Applicability of Field Programmable Analog Arrays to Capacitive Sensing in the Sub-pF Range
5. A NOVEL Z-AXIS ACCELEROMETER WITH PERFECTLY-ALIGNED, FULLY-OFFSET VERTICAL COMBS FABRICATED USING THE EXTENDED SACRIFICIAL BULK MICROMACHINING PROCESS
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