Tribological properties of SiC coatings deposited by r.f. magnetron sputtering as a function of substrate temperature
Author:
Affiliation:
1. a Surface and Nanoscience Division, Material Science Group, Indira Gandhi Centre for Atomic Research , Kalpakkam 603 102 , Tamil Nadu , India
Publisher
Informa UK Limited
Subject
Condensed Matter Physics
Link
https://www.tandfonline.com/doi/pdf/10.1080/09500839.2011.583287
Reference19 articles.
1. Investigation and characterisation of silicon nitride and silicon carbide thin films
2. The morphology and mechanical properties of Al2O3, ZrO2 and SiC laser-assisted physically vapour deposited films
3. Mechanical properties of SiC films prepared by dynamic ion mixing
4. SiC synthesis by a plasma deposition process
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