Optimisation, design and characterisation of a piezoelectric micro suspension-Reference-Cited by-同舟云学术

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Optimisation, design and characterisation of a piezoelectric micro suspension

Published:2012-06 Issue:2 Volume:3 Page:123-140
ISSN:1947-5411
Container-title:International Journal of Smart and Nano Materials
language:en
Short-container-title:International Journal of Smart and Nano Materials

Author:

Verdot T.,Collet M.,Muralt P.

Publisher

Informa UK Limited

Subject

General Materials Science,Civil and Structural Engineering,Mechanics of Materials

Link

http://www.tandfonline.com/doi/pdf/10.1080/19475411.2011.651510

Reference23 articles.

1. Structural dynamics of microsystems—current state of research and future directions

2. Active isolation of electronic micro-components with piezoelectrically transduced silicon MEMS devices

3. Active damping of ‘parasitic’ vibration modes of a quartz sensor

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Polar Oxide Thin Films for MEMS Applications;Chemical Solution Deposition of Functional Oxide Thin Films;2013

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