TiNiHf/SiO<sub>2</sub>/Si shape memory film composites for bi-directional micro actuation-Reference-Cited by-同舟云学术

TiNiHf/SiO₂/Si shape memory film composites for bi-directional micro actuation

Published:2022-04-03 Issue:2 Volume:13 Page:293-314
ISSN:1947-5411
Container-title:International Journal of Smart and Nano Materials
language:en
Short-container-title:International Journal of Smart and Nano Materials

Author:

Curtis Sabrina M.¹²,Sielenkämper Marian¹^ORCID,Arivanandhan Gowtham³,Dengiz Duygu¹,Li Zixiong³,Jetter Justin¹,Hanke Lisa¹,Bumke Lars¹,Quandt Eckhard¹,Wulfinghoff Stephan¹,Kohl Manfred³

Affiliation:

1. Institute for Materials Science, Kiel University (CAU), Kiel, Germany

2. Materials Science and Engineering, University of Maryland, College Park, MD, United States

3. Institute of Microstructure Technology, Karlsruhe Institute of Technology (KIT), Karlsruhe, Germany

Funder

National Science Foundation Graduate Research Fellowship

Publisher

Informa UK Limited

Subject

General Materials Science,Civil and Structural Engineering,Mechanics of Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/19475411.2022.2071352

Reference65 articles.

1. MEMS for Photonic Integrated Circuits

2. Optical MEMS devices based on moving waveguides

3. Shape Memory Alloy (SMA)-Based Microscale Actuators with 60% Deformation Rate and 1.6 kHz Actuation Speed

4. Phase transformation, structural and functional fatigue properties of Ti–Ni–Hf shape memory thin films

5. Effects of nanoprecipitation on the shape memory and material properties of an Ni-rich NiTiHf high temperature shape memory alloy

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