Beam Scanning Confocal Differential Heterodyne Interferometry-Reference-Cited by-同舟云学术

Beam Scanning Confocal Differential Heterodyne Interferometry

Published:2007-03-30 Issue:1 Volume:1 Page:27-45
ISSN:1559-9612
Container-title:International Journal of Optomechatronics
language:en
Short-container-title:International Journal of Optomechatronics

Author:

Song Cheol,Kim Tae Joong,Gweon Dae-Gab

Publisher

Informa UK Limited

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Instrumentation

Link

http://www.tandfonline.com/doi/pdf/10.1080/15599610701261076

Reference14 articles.

1. Object characterization with a differential heterodyne microscope

2. Simplified differential phase optical microscope

3. Kim , Tae Joong , Seung Woo Lee , Dae Gab Gweon , Suk Won Lee , and Kwang Soo Kim. 2004 . Precision measurement of large step height using confocal differential heterodyne interfeormetry. (CDHI) .Euspen 4th International Conference282 : 283 .

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