Author:
Zimin A. M.,Guseva M. I.,Elistratov N. G.,Danelyan L. S.,Gureev V. M.,Kolbasov B. N.,Kulikauskas V. S.,Stolyarova V. G.,Vasiliev N. N.,Zatekin V. V.
Subject
Condensed Matter Physics,Nuclear Energy and Engineering
Reference10 articles.
1. Danilin BS Syrchin VK Magnetron sputtering systems, Radio and Communications Moscow (1982) p. 2 (in Russian)
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