Integrated statistical process control and engineering process control for a manufacturing process with multiple tools and multiple products-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Integrated statistical process control and engineering process control for a manufacturing process with multiple tools and multiple products

Published:2015-04-03 Issue:3 Volume:32 Page:174-185
ISSN:2168-1015
Container-title:Journal of Industrial and Production Engineering
language:en
Short-container-title:Journal of Industrial and Production Engineering

Author:

Lee Shui-Pin,Wong David Shan-Hill,Sun Cheng-I,Chen Wun-Hwa,Jang Shi-Shang

Funder

Ministry of Science and Technology

Advanced Manufacturing and Service Management Center of National Tsing-Hua University.

Publisher

Informa UK Limited

Subject

Industrial and Manufacturing Engineering,Control and Systems Engineering

Link

http://www.tandfonline.com/doi/pdf/10.1080/21681015.2015.1026419

Reference28 articles.

1. A CUSUM Scheme for Autocorrelated Observations

2. A G&P EWMA algorithm for high-mix semiconductor manufacturing processes

3. Age-based double EWMA controller and its application to CMP processes

4. An SPC Model for Short Production Runs: Minimizing Expected Cost

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Minimax Optimization for Recipe Management in High-Mixed Semiconductor Lithography Process;IEEE Transactions on Industrial Informatics;2020-08

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP