Modeling the micro-scale static friction coefficient of the MEMS silicon surfaces affected by Ag and Au deposition using the thermal evaporation method-Reference-Cited by-同舟云学术

Modeling the micro-scale static friction coefficient of the MEMS silicon surfaces affected by Ag and Au deposition using the thermal evaporation method

Published:2018-11-19 Issue:4 Volume:33 Page:355-370
ISSN:0169-4243
Container-title:Journal of Adhesion Science and Technology
language:en
Short-container-title:Journal of Adhesion Science and Technology

Author:

Kolahdoozan Mojtaba¹²,Saedi Hamed¹,Sina Nima¹^ORCID,Oveissi Soheil¹^ORCID

Affiliation:

1. Department of Mechanical Engineering, Najafabad Branch, Islamic Azad University, Najafabad, Iran;

2. Modern Manufacturing Technologies Research Center, Najafabad Branch, Islamic Azad University, Najafabad, Iran

Publisher

Informa UK Limited

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanics of Materials,General Chemistry

Link

https://www.tandfonline.com/doi/pdf/10.1080/01694243.2018.1496394

Reference35 articles.

1. A novel model for the effect of geometric properties of micro/nanoscale asperities on surface adhesion

2. An integrated and compact device for microassembly exploiting electrostatic sorting and capillary grasping

3. Non-contact handling in microassembly: Acoustical levitation

4. Systematic investigation of the properties of TiO2 films grown by reactive ion beam sputter deposition

5. Effect of angle of deposition on micro-roughness parameters and optical properties of HfO2 thin films deposited by reactive electron beam evaporation

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