Automatic Microwave Tuner for Plasma Deposition Applications Using a Gradient Search Method-Reference-Cited by-同舟云学术

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Automatic Microwave Tuner for Plasma Deposition Applications Using a Gradient Search Method

Published:1997-01 Issue:1 Volume:32 Page:28-33
ISSN:0832-7823
Container-title:Journal of Microwave Power and Electromagnetic Energy
language:en
Short-container-title:Journal of Microwave Power and Electromagnetic Energy

Author:

Chtcherbakov A. A.,Swart R. L.

Publisher

Informa UK Limited

Subject

Electrical and Electronic Engineering,Metals and Alloys,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Link

http://www.tandfonline.com/doi/pdf/10.1080/08327823.1997.11688320

Reference3 articles.

1. Collin, R.E. 1966. Foundations for Microwave Engineering, McGraw-Hill Kogakusha, Ltd., Tokyo.

2. Cooper, L. and Steinberg, D. 1970, Introduction to methods of optimization. W. B. Saunders, Philadelphia: 166–168.

3. Moisan, M. and Pelletier, J. (Eds) 1992. Microwave Excited Plasmas. Elsevier Science Publisher B.V., Amsterdam: 473–490.

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2. A dynamic impedance matching algorithm of three-stub tuners based on equivalent circuit analysis;Journal of Microwave Power and Electromagnetic Energy;2020-10-01

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