A state-of-art review and a simple meta-analysis on deterministic scheduling of diffusion furnaces in semiconductor manufacturing-Reference-Cited by-同舟云学术

A state-of-art review and a simple meta-analysis on deterministic scheduling of diffusion furnaces in semiconductor manufacturing

Published:2022-08-06 Issue: Volume: Page:1-28
ISSN:0020-7543
Container-title:International Journal of Production Research
language:en
Short-container-title:International Journal of Production Research

Author:

Vimala Rani M.¹,Mathirajan Muthu²

Affiliation:

1. Vinod Gupta School of Management, Indian Institute of Technology, Kharagpur 721302, India

2. Department of Management Studies, Indian Institute of Science, Bangalore 560012, India

Publisher

Informa UK Limited

Subject

Industrial and Manufacturing Engineering,Management Science and Operations Research,Strategy and Management

Link

https://www.tandfonline.com/doi/pdf/10.1080/00207543.2022.2102449

Reference90 articles.

1. Batching and Scheduling Jobs on Batch and Discrete Processors

2. Metaheuristics for scheduling jobs with incompatible families on parallel batching machines

3. A heuristic approach for a scheduling problem with periodic maintenance and sequence-dependent setup times

4. Genetic algorithm based scheduling of parallel batch machines with incompatible job families to minimize total weighted tardiness

5. Bar-Noy, A., S. Guha, Y. Katz, J. S. Naor, B. Schieber, and H. Shachnai. 2002. “Throughput Maximization of Real-Time Scheduling With Batching.” Proceedings of the thirteenth annual ACM-SIAM Symposium on Discrete Algorithms, 742–751.

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Deploying an Advanced Scheduling Solution to Optimize Conflicting KPIs in the Diffusion Area at Renesas Electronics;2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2024-05-13

2. Population-based iterated local search for batch scheduling on parallel machines with incompatible job families, release dates, and tardiness penalties;Optimization Letters;2024-04-26