1. Institute of Ion-Plasma and Laser Technologies named after U.A. Arifov, Uzbekistan Academy Sciences, Tashkent, Uzbekistan
2. National University of Uzbekistan named after Mirzo Ulugbek, Tashkent, Uzbekistan
3. School of Materials Science and Engineering, Ocean University of China, Qingdao, China
4. Department of Physics, Gulistan State University, Gulistan, Uzbekistan
5. Tashkent State Technical University, Tashkent, Uzbekistan