Correlations between deposition parameters, mechanical properties, and microstructure for diamond-like carbon films synthesized by RF-PECVD
Author:
Publisher
Informa UK Limited
Subject
General Engineering
Link
http://www.tandfonline.com/doi/pdf/10.1080/02533839.2012.727639
Reference15 articles.
1. Ion‐Beam Deposition of Thin Films of Diamondlike Carbon
2. Effect of target self-bias voltage on the mechanical properties of diamond-like carbon films deposited by RF magnetron sputtering
3. Interpretation of Raman spectra of disordered and amorphous carbon
4. Intelliwave, 2004. Intelliwave TM version 4.0, Engineering Synthesis Design Inc. Tucson, AZ, USA
5. Investigation of mechanical and tribological properties of amorphous diamond-like carbon coatings
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