ON-LINE FIBRE OPTIC BASED INSPECTION USING CHROMATIC MODULATION FOR SEMICONDUCTOR MATERIALS PROCESSING
Author:
Publisher
Informa UK Limited
Subject
General Physics and Astronomy,Mechanical Engineering,Mechanics of Materials,General Materials Science
Link
http://www.tandfonline.com/doi/pdf/10.1080/10589759608952861
Reference9 articles.
1. Chromatic interferometry for an intelligent plasma processing system
2. Chromatic modulation based metrology
3. GLHS: A Generalized Lightness, Hue, and Saturation Color Model
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