A survey of dispatching rules for operational control in wafer fabrication-Reference-Cited by-同舟云学术

A survey of dispatching rules for operational control in wafer fabrication

Published:2010-12-15 Issue:1 Volume:22 Page:4-24
ISSN:0953-7287
Container-title:Production Planning & Control
language:en
Short-container-title:Production Planning & Control

Author:

Sarin Subhash C.¹,Varadarajan Amrusha¹,Wang Lixin¹

Affiliation:

1. a Grado Department of Industrial and Systems Engineering , Virginia Tech , Blacksburg, VA 24061, USA

Publisher

Informa UK Limited

Subject

Industrial and Manufacturing Engineering,Management Science and Operations Research,Strategy and Management,Computer Science Applications

Link

https://www.tandfonline.com/doi/pdf/10.1080/09537287.2010.490014

Reference91 articles.

1. Cycle-time improvements for photolithography process in semiconductor manufacturing

2. Akcali , E . et al., 2000. Alternative loading and dispatching policies for furnace operations in semiconductor manufacturing: a comparison by simulation. J.A. Joines,et al. eds.Proceedings of the 2000 winter simulation conference, Orlando, Florida. Society for computer simulation international: San Diego, CA, USA, 1428–1435

3. A spatial rule adaptation procedure for reliable production control in a wafer fabrication system

4. Bahaji , N and Kuhl , ME . 2008. A simulation study of new multi-objective composite dispatching rules, CONWIP, and push lot release in semiconductor fabrication.International Journal of Production Research, 46 (14), 3801–3824

Cited by 70 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Multi-attribute and predictive cascaded fuzzy system for the AGV dispatching in a flexible manufacturing system;The International Journal of Advanced Manufacturing Technology;2024-08-29

2. Digital Twin-based bottleneck prediction for improved production control;Computers & Industrial Engineering;2024-06

3. Scheduling Semiconductor Manufacturing Operations in Research and Development Environments;2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2024-05-13

4. A Reinforcement Learning Approach for Improved Photolithography Schedules;2023 Winter Simulation Conference (WSC);2023-12-10

5. Learning Priority Indices for Energy-Aware Scheduling of Jobs on Batch Processing Machines;IEEE Transactions on Semiconductor Manufacturing;2023