The structural, chemical and compositional nature of amorphous silicon carbide films
Author:
Affiliation:
1. a Carnegie Laboratory of Physics, University of Dundee , Dundee, DD1 4HN , Scotland
2. b Chemistry Department , University of Dundee , Dundee, DD1 4HN , Scotland
Publisher
Informa UK Limited
Subject
General Physics and Astronomy,General Chemical Engineering
Link
https://www.tandfonline.com/doi/pdf/10.1080/13642819008226986
Reference31 articles.
1. Electrical and optical properties of amorphous silicon carbide, silicon nitride and germanium carbide prepared by the glow discharge technique
2. Electronic and optical properties of a-Si1-xCx films prepared from a H2-diluted mixture of SiH4 and CH4
3. Reactive plasma deposited SixCyHz films
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