Parametric Yield Modeling Using Hidden Variable Logistic Regression
Author:
Affiliation:
1. Samsung Electronics, Banwol-dong, Hwasung-si, Gyeonggi-do, Korea 445-701
2. Korea Aerospace University, Hwajeon-dong, Goyang-si, Gyeonggi-do, Korea 412-791
Publisher
Informa UK Limited
Subject
Industrial and Manufacturing Engineering,Management Science and Operations Research,Strategy and Management,Safety, Risk, Reliability and Quality
Link
https://www.tandfonline.com/doi/pdf/10.1080/00224065.2014.11917975
Reference19 articles.
1. Latent Variable Regression for Multiple Discrete Outcomes
2. Semiconductor yield improvement: results and best practices
3. Concomitant-Variable Latent-Class Models
4. Run-to-Run Process Control: Literature Review and Extensions
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