Fabrication of ferroelectric Bi4Ti3O12 thin films and micropatterns by means of chemical solution decomposition and electron beam irradiation
Author:
Affiliation:
1. a Science University of Tokyo in Yamaguchi , Onoda, Yamaguchi, 756, Japan
2. b Science University of Tokyo , Shinjuku-ku, Tokyo, 162, Japan
3. c Kyoto University , Sakyo-ku, Kyoto, 606-01, Japan
Publisher
Informa UK Limited
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials
Link
https://www.tandfonline.com/doi/pdf/10.1080/10584589708221708
Reference6 articles.
1. New selective deposition technology by electron-beam induced surface reaction
2. Electron-Beam-Induced Structuring of Composite Oxides by means of Dipping Pyrolysis of Metal Naphthenate Films
3. Micropatterning of Ferroelectric Bi4Ti3O12Using Electron-Beam-Induced Reaction of Metal Octylate Films
4. Crystallization of Precursor Micropatterns of Ferroelectric Bi4Ti3O12Fabricated by Electron Beam Scanning
5. Fabrication of FerroelectricBi4Ti3O12Thin Films by Dipping Pyrolysis of Metal Naphthenates and Micropatterns by an Electron Beam
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