Influence of conditions of r.f. sputtering on chemical constitution and structure of PZT-type thin films
Author:
Affiliation:
1. a Department of Materials Science , Silesian University , 2, Śnieżna St., 41–200, Sosnowiec, Poland
2. b Faculty of Physics , Rostov State University , 5, Zorge St., 344104, Rostov-on-Don, Russia
Publisher
Informa UK Limited
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials
Link
https://www.tandfonline.com/doi/pdf/10.1080/10584589908210152
Reference44 articles.
1. Performance of sputtered pb0.92bi0.07la0.01(fe0.405NB0.325Zr0.27)O3 ferroelectric memory films
2. Some electrical and optical properties of ferroelectric lead‐zirconate–lead‐titanate thin films
3. Surowiak , Z. 1977. “Problems of physics of ferroelectric thin films”. p. 394Katowice: Silesian University. (in Polish)
4. Pb(Zr·Ti)O3Films by RF Sputtering in PbO Vapour
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1. Influence of plasma pressure on the growth characteristics and ferroelectric properties of sputter-deposited PZT thin films;Applied Surface Science;2010-08
2. Preparation, basic physical properties, and possibilities of application of PZT-based thin films;SPIE Proceedings;2003-10-21
3. Domain structures in the perovskite-type heteroepitaxial ferroelectric thin films;SPIE Proceedings;2001-04-17
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