Effects of interfacial roughness on the leakage properties of SrTiO3 thin film capacitors-Reference-Cited by-同舟云学术

Effects of interfacial roughness on the leakage properties of SrTiO3 thin film capacitors

Published:1995-11 Issue:1-4 Volume:11 Page:121-127
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Fukuda Yukio¹,Aoki Katsuhiro¹,Numata Ken¹,Aoyama Shintaro¹,Nishimura Akitoshi¹,Summerfelt Scott²,Tsu Robert²

Affiliation:

1. a Texas Instruments Japan Ltd., Inashikigun , Ibaraki, 300–04, Japan

2. b Texas Instruments Incorporated , Dallas, TX, 75246, USA

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584589508013584

Reference11 articles.

1. Electric Properties of SrTiO3Thin Films Prepared by RF Sputtering

2. Epitaxial Growth of SrTiO3Films on Pt Electrodes and Their Electrical Properties

3. Current-Voltage Characteristics of Electron-Cyclotron-Resonance Sputter-DepositedSrTiO3Thin Films

4. RF Sputtered Strontium Titanate Films

5. SrTiO3Thin Film Preparation by Ion Beam Sputtering and Its Dielectric Properties

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