Fabrication of suspended piezoelectric microresonators-Reference-Cited by-同舟云学术

Fabrication of suspended piezoelectric microresonators

Published:1999-08 Issue:1-4 Volume:24 Page:147-154
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Piekarski B.¹,Dubey M.¹,Devoe D.²,Zakar E.¹,Zeto R.¹,Conrad J.¹,Piekarz R.¹,Ervin M.¹

Affiliation:

1. a U.S. Army Research Laboratory , Adelphi, Maryland, 20783

2. b Department of Mechanical Engineering and Institute for Systems Research , University of Maryland, College Park , Maryland, 20742

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584589908215587

Reference12 articles.

1. Fabrication of thick Si resonators with a frontside-release etch-diffusion process

2. DeVoe , D. L. 1997. “Thin Film Zinc Oxide Microsensors and Microactuators”. Berkeley, Fall: University of California. Ph.D. Dissertation

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