Sputter deposition of SrTiO3 thin films for voltage tunable capacitors
Author:
Affiliation:
1. a Sandia National Laboratories , Albuquerque, New Mexico, 87185
2. b Superconducting Core Technologies, Inc. , Golden, Colorado, 80401
Publisher
Informa UK Limited
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials
Link
https://www.tandfonline.com/doi/pdf/10.1080/10584589708012999
Reference13 articles.
1. Characterization of a tunable thin film microwave YBa2Cu3O7−x/SrTiO3coplanar capacitor
2. Ferroelectric phase shifters and their performance in microwave phased array antennas
3. Electrical response of ferroelectric/superconducting/dielectric BaxSr1-xTiO3/YBa2Cu3O7- delta/LaAlO3thin-film multilayer structures
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1. Voltage induced acoustic resonance in metal organic chemical vapor deposition SrTiO3 thin film;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2012-11
2. Dielectric Tunability of (Sr0.8Pb0.2)TiO3-MgO Composites Under High Electric Fields;Integrated Ferroelectrics;2011-01
3. Propiedades dieléctricas de láminas delgadas de (Pb,Ca)TiO3 con alto contenido de Ca;Boletín de la Sociedad Española de Cerámica y Vidrio;2004-04-30
4. Control of Microstructure and Orientation in Solution-Deposited BaTiO3and SrTiO3Thin Films;Journal of the American Ceramic Society;1999-09
5. PEROVSKITE THIN FILMS FOR HIGH-FREQUENCY CAPACITOR APPLICATIONS;Annual Review of Materials Science;1998-08
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