Dry etching of (Ba, Sr)TiO3 with Cl2, SF6, and CF4

Author:

Milkove Keith R.1

Affiliation:

1. a IBM T. J. Watson Research Center , Yorktown Heights , New York , 10598 , USA

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. Aoki , H. Hashimoto , T. Ikawa , E. Kikkawa , T. Yamamichi , S. Sakuma , T. and Miyasaka , Y. 1992. Extended Abstracts of the 1992 International Conference on Solid State Devices and Materials. 1992, Tsukuba. pp.554

2. Stowell , S. Desu , S. B. and Sengupta , S. IEEE International Symposium on Applications of Ferroelectrics V2. 1996, Piscataway, NJ. pp.859

3. A reactive ion etch study for producing patterned platinum structures

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