Materials interactions in the integration of PZT ferroelectric capacitors-Reference-Cited by-同舟云学术

Materials interactions in the integration of PZT ferroelectric capacitors

Published:1995-01 Issue:1-4 Volume:6 Page:81-92
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Jones R. E.¹,Maniar P. D.¹,Campbell A. C.¹,Moazzami R.¹,Dupuie J. L.²,Gregory R. B.³,Kottke M. L.³,Bozack M. L.⁴,Williams J. R.¹,Ferrero J. M.¹

Affiliation:

1. a Materials Research and Strategic Technologies , Motorola Austin, Texas, 78721, U.S.A.

2. c Plastic and Trim Products Division , Ford Motor Co. , Redford, MI, 48239, U.S.A.

3. d MRST, Motorola , Mesa, AZ, 85201, U.S.A.

4. b Dept. of Physics , Auburn University , Auburn, Alabama, 36849, U.S.A.

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584589508019355

Reference6 articles.

1. Effects of anneal ambients and Pt thickness on Pt/Ti and Pt/Ti/TiN interfacial reactions

2. Epitaxial growth of ferroelectric PLZT [(Pb, La)(Zr, Ti)O3] thin films

3. Dielectric Properties of PLZT Epitaxial Thin Films

4. Impact of Backend Processing on Integrated Ferroelectric Capacitor Characteristics

5. Substrate and temperature effects in lead zirconate titanate films produced by facing targets sputtering

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