Elements of the leakage current of high-ε ferroelectric PZT films

Author:

Wouters Dirk J.1,Willems Geert1,Groeseneken Guido1,Maes Herman E.1,Brooks Keith2

Affiliation:

1. a IMEC , Kapeldreef 75, B-3001, Leuven, BELGIUM

2. b EPFL, Lab. de Céramique , MX-D Ecublens, Lausanne, SWITZERLAND

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. Moazammi , R. Proc. IEDM. 1992. pp.10.7.1–10.7.3. Piscataway: IEEE.

2. Yoo , I. K. and Desu , S. B. Proc. of the 8th ISAF Conference. 1992. pp.225–228. Piscataway: IEEE.

3. Correlations Among Degradations in Lead Zirconate Titanate thin Film Capacitors

4. Chen , X. Kingon , A. I. and Auciello , O. Proc. of the 8th ISAF Conference. 1992. pp.229–232. IEEE.

5. Polarity and Area Dependence of Reliability Characteristics of Sputitered and Sol-Gel Derived Thin Plzt Films for Dram Applications

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