Characterization of Polymer Thin Films Sputtered onto a Copper Substrate with Two Kinds of Polyimide Targets
Author:
Publisher
Informa UK Limited
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Link
http://www.tandfonline.com/doi/pdf/10.1080/15421400701545411
Reference15 articles.
1. Preparation and tribological properties of sputtered polyimide film
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3. Thin polymer films prepared by radio frequency plasma sputtering of polytetrafluoroethylene and polyetherimide targets
4. The properties of films prepared by the rf sputtering of PTFE and plasma polymerization of some freons
5. Radio frequency sputtering process of a polytetrafluoroethylene target and characterization of fluorocarbon polymer films
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