Study on Thermal Effect on the SEM Contrast of a Nanorod in a Fast Scanning Mode
Author:
Affiliation:
1. School of Electrical Engineering, Tongling University, Tongling, China
Funder
Tongling University
Publisher
Informa UK Limited
Link
https://www.tandfonline.com/doi/pdf/10.1080/23324309.2024.2317773
Reference23 articles.
1. Cathodoluminescence determination of the temperature rise in CdS under an electron beam spot
2. Nonlocal and Nonequilibrium Heat Conduction in the Vicinity of Nanoparticles
3. Submicron thermocouple measurements of electron-beam resist heating
4. Transient temperature measurements of resist heating using nanothermocouples
5. Secondary Electron Emission of Crystalline MgO
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