Silicon-Based Integrated Optic Pressure Sensor Using Intermodal Interference between TM-Like and TE-Like Modes
Author:
Publisher
Informa UK Limited
Subject
Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference8 articles.
1. Modern trends in microstructures and integrated optics for communication, sensing, and actuation
2. Micro-opto-mechanical vibration sensor integrated on silicon
3. Integrated optic pressure sensor on silicon substrate
4. Imbalanced Mach-Zehnder interferometer integrated in micromachined silicon substrate for pressure sensor
5. Integrated optical ring resonator with micromechanical diaphragms for pressure sensing
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