Effect of oxygen flow rate on properties of multilayer aluminum-doped indium saving ITO thin films produced by sputtering method-Reference-Cited by-同舟云学术

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Effect of oxygen flow rate on properties of multilayer aluminum-doped indium saving ITO thin films produced by sputtering method

Published:2023-05-23 Issue:1 Volume:765 Page:114-120
ISSN:1542-1406
Container-title:Molecular Crystals and Liquid Crystals
language:en
Short-container-title:Molecular Crystals and Liquid Crystals

Author:

Sergiienko R.¹,Petrovska S.²,Ilkiv B.²,Nakamura T.³,Ohtsuka M.³

Affiliation:

1. National Academy of Science of Ukraine, Physico-Technological Institute of Metals and Alloys, Kyiv, Ukraine

2. National Academy of Science of Ukraine, Frantsevich Institute for Problems of Materials Science, Kyiv, Ukraine

3. Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University, Sendai, Japan

Funder

New Energy and Industrial Technology Development Organization

Publisher

Informa UK Limited

Subject

Condensed Matter Physics,General Materials Science,General Chemistry

Link

https://www.tandfonline.com/doi/pdf/10.1080/15421406.2023.2215033

Reference20 articles.

1. The main role of thermal annealing in controlling the structural and optical properties of ITO thin film layer

2. Structural, electrical, and optical properties of ITO thin films and their influence on performance of CdS/CdTe thin-film solar cells

3. Thickness dependence of electrical properties of ITO film deposited on a plastic substrate by RF magnetron sputtering

4. Optical and electrical properties of ITO thin films sputtered on flexible FEP substrate as passive thermal control system for space applications

5. Mechanical performance of ITO/Ag/ITO multilayer films deposited on glass substrate by RF and DC magnetron sputtering

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Multilayer Fe ₃ O ₄ -doped ITO indium saving indium tin oxide thin films;Molecular Crystals and Liquid Crystals;2024-06-03

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