Compositional and structural analysis of hydrogenated amorphous silicon—nitrogen alloys prepared by plasma-enhanced chemical vapour deposition
Author:
Affiliation:
1. a Dipartimento di Fisica ed Unita Infm del Politecnico di Torino , C. so Duca degli Abruzzi 24, 10129 , Torino , Italy
Publisher
Informa UK Limited
Subject
General Physics and Astronomy,General Chemical Engineering
Link
https://www.tandfonline.com/doi/pdf/10.1080/01418639608240333
Reference48 articles.
1. Infrared spectroscopy of interfaces in amorphous hydrogenated silicon/silicon nitride superlattices
2. Silicon nitride formation from a silane–nitrogen electron cyclotron resonance plasma
3. Structural properties of a-SiC:H- and a-SiN:H-Alloys from XPS-analyses and IR-absorption
4. Structural information from the Raman spectrum of amorphous silicon
5. Composition and Thermal Stability of Glow-Discharge a-Si:C:H and a-Si:N:H Alloys
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