The optical properties of sputtered amorphous silicon nitride films: Effect of RF power
Author:
Affiliation:
1. a Unité de Recherche de Physique des Materiaux et Applications , Université de Constantine , Constantine , 25000 , Algerie
2. b Centre Universitaire de Biskra , 70000 , Algerie
3. c Centre Universitaire de Tebessa , Tebessa , 12000 , Algerie
Publisher
Informa UK Limited
Subject
General Physics and Astronomy,General Chemical Engineering
Link
https://www.tandfonline.com/doi/pdf/10.1080/01418639609365829
Reference28 articles.
1. Thermal Diffusion of Sodium in Silicon Nitride Shielded Silicon Oxide Films
2. The Preparation and Properties of Amorphous Silicon Nitride Films
3. Disorder and the Optical-Absorption Edge of Hydrogenated Amorphous Silicon
4. Optical properties of amorphous SiNx(:H) films
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