Research on sapphire micro-blind-hole machining based on femtosecond laser-Reference-Cited by-同舟云学术

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Research on sapphire micro-blind-hole machining based on femtosecond laser

Published:2020-07-23 Issue:1 Volume:563 Page:31-44
ISSN:0015-0193
Container-title:Ferroelectrics
language:en
Short-container-title:Ferroelectrics

Author:

Fang Xuyang¹²,Dou Jian¹²,Dong Xiangyang¹²,Duan Wenqiang¹²³

Affiliation:

1. State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, P. R. China;

2. Shaanxi Key Laboratory of Intelligent Robots, Xi’an Jiaotong University, Xi’an, P. R. China;

3. Xi’an Jiaotong University Shenzhen Research Institute, Shenzhen, P. R. China

Publisher

Informa UK Limited

Subject

Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/00150193.2020.1760607

Reference67 articles.

1. Sapphire Substrate Liftoff With Photoelectrochemical Etching for Vertical Light-Emitting Diode Fabrication

2. Laser produced plasma in crystalline α‐Al2O3and aluminum metal

3. Surface machining characteristics of sapphire with fifth harmonic YAG laser pulses

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Investigation on wear behavior for SUS420 steel gear based on discrete laser surface melting;Optics & Laser Technology;2024-03

2. Femtosecond Laser Fabrication of Microchannels in Transparent Hard Materials;Advanced Materials Technologies;2023-04-02

3. Theoretical and Experimental Studies on Ultraviolet Nanosecond Laser Micromachining of Sapphire;Integrated Ferroelectrics;2022-10-06

4. A Numerical Simulation and Experimental Study on the Ultrafast Double-Laser Precision Cutting of Sapphire Materials;Crystals;2022-06-19

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