Monte Carlo simulation of gas free molecular flow in turbo molecular pump’s inlet tube
Author:
Affiliation:
1. School of Mechanical Engineering & Automation, Northeastern University, Shenyang, People’s Republic of China
2. Chinese Academy of Sciences, Shenyang Institute of Automation, Shenyang, People’s Republic of China
Publisher
Informa UK Limited
Subject
Condensed Matter Physics,General Materials Science,General Chemical Engineering,Modelling and Simulation,Information Systems,General Chemistry
Link
https://www.tandfonline.com/doi/pdf/10.1080/08927022.2018.1485151
Reference26 articles.
1. The turbomolecular pump, its design, operation and theory; calculation of the pumping speed for various gases and their dependence on the forepump
2. High-Speed Drag-Cup Induction Motors for Turbo-Molecular Pump Applications
3. Turbomolecular pump design for high pressure operation
4. Design modification in rotor blade of turbo molecular pump
5. A new type of turbomolecular vacuum pump bearing
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