1. Dallas , A.J. ; Bellefeuille , C. ; Arends , D. ; Grafe , T. ( 1997 ) Pushing Chemical Filtration Technology towards the Future: Low Concentrations. Proceedings of the 10th Annual Technical Conference of the American Filtration and Separations Society , Minneapolis, MN, April, 1997 , Advances in Filtration and Separation Technology , E.R. Baumann and L. Weisert , Eds, Vol. 11 , 285 .
2. Contamination control for processing DUV chemically amplified photoresists