Effect of Glow Discharge Conditions on Structure and Thermal Properties of Polysilazane Thin Films
Author:
Affiliation:
1. a Polish Academy of Sciences Centre of Molecular and Macromolecular Studies , 90-362 , Łódó , Boczna 5 , Poland
Publisher
Informa UK Limited
Subject
General Engineering
Link
https://www.tandfonline.com/doi/pdf/10.1080/00222337808069402
Reference15 articles.
1. Electrical properties of metal-polymer (polysiloxane)-silicon structures and application of polysiloxane to the passivation of semiconductor devices
2. Survey of low temperature rf plasma polymerization and processing
3. A scanning electron microscope study of plasma-polymerized organosilicon films suitable for use as lightguides. A determination of the cause of signal attenuation
4. Thin Organosilicon Films for Integrated Optics
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