Analysis and optimization of parameters in optical polishing of large diameter BK7 flat components
Author:
Affiliation:
1. Mechanical Engineering Department, PEC University of Technology, Chandigarh, India
2. Central Scientific Instruments Organisation (CSIR-CSIO), Chandigarh, India
Publisher
Informa UK Limited
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science
Link
https://www.tandfonline.com/doi/pdf/10.1080/10426914.2016.1221103
Reference33 articles.
1. Wear phenomena in chemical mechanical polishing
2. Wear‐Contact Problems and Modeling of Chemical Mechanical Polishing
3. Marinescu, I.D.; Uhlmann, E.; Doi, T.K.Handbook of Lapping and Polishing; CRC Press/Taylor & Francis Group: London, 2007; 491pp.
4. Rayleigh, L.Proceedings of the Royal Institution of Great Britain, March, 1901;Transactions of the Optical Society,19, October, 1917.
5. The Mechanics of Optical Polishing
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