Synthesis of c-axis oriented AlN thin films at room temperature
Author:
Affiliation:
1. Faculty of Engineering, Department of Metallurgical and Materials Engineering, Mugla Sitki Kocman University, 48000, Kotekli, Mugla, Turkey
Publisher
Informa UK Limited
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
https://www.tandfonline.com/doi/pdf/10.1080/02670844.2016.1235522
Reference39 articles.
1. Synthesis and microstructural characterisation of reactive RF magnetron sputtering AlN films for surface acoustic wave filters
2. Structure and morphology evolution of ALN films grown by DC sputtering
3. Influence of deposition conditions on optical properties of aluminum nitride (AlN) thin films prepared by DC-reactive magnetron sputtering
4. Reactive DC magnetron sputtering of aluminum nitride films for surface acoustic wave devices
5. Physical properties of polycrystalline aluminium nitride films deposited by magnetron sputtering
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