1. National Engineering Laboratory for Modern Materials Surface Engineering Technology, Guangdong Institute of New Materials, Guangzhou, People’s Republic of China
2. The Key Lab of Guangdong for Modern Surface Engineering Technology, Guangdong Institute of New Materials, Guangzhou, People’s Republic of China
3. Guangdong Industrial Analysis & Testing Center, Guangzhou, People’s Republic of China
4. Plasma Giken Co. Ltd., Saitama, Japan