Investigation of hydrogen effect on phosphorus-doped polysilicon thin films
Author:
Affiliation:
1. Laboratory of Semi-Conductors, Department of Physics, Faculty of Sciences, University Badji-Mokhtar, Annaba, Algeria
Publisher
Informa UK Limited
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
https://www.tandfonline.com/doi/pdf/10.1080/02670844.2018.1536377
Reference17 articles.
1. Electrical properties of self-aligned gate-all-around polycrystalline silicon nanowires field-effect transistors
2. Nano-textured polysilicon solar absorption films
3. Chemical Mechanical Polishing (CMP) Processes for Manufacturing Optical Silicon Substrates with Shortened Polishing Time
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