Ion sputtering for preparation of thin MAX and MXene phases-Reference-Cited by-同舟云学术

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Ion sputtering for preparation of thin MAX and MXene phases

Published:2020-01-02 Issue:1-2 Volume:175 Page:177-189
ISSN:1042-0150
Container-title:Radiation Effects and Defects in Solids
language:en
Short-container-title:Radiation Effects and Defects in Solids

Author:

Vacík J.¹,Horák P.¹,Bakardjieva S.²,Bejsovec V.¹,Ceccio G.¹,Cannavo A.¹,Torrisi A.¹^ORCID,Lavrentiev V.¹,Klie R.³

Affiliation:

1. Nuclear Physics Institute (NPI), Czech Academy of Sciences (CAS), Řež, Czech Republic

2. Institute of Inorganic Chemistry (IIC), Czech Academy of Sciences (CAS), Řež, Czech Republic

3. Department of Physics, University of Illinois at Chicago (UIC), Chicago, IL, USA

Publisher

Informa UK Limited

Subject

Condensed Matter Physics,General Materials Science,Nuclear and High Energy Physics,Radiation

Link

https://www.tandfonline.com/doi/pdf/10.1080/10420150.2020.1718142

Reference18 articles.

1. Handbook of Thin-Film Technology

2. Principles of Chemical Vapor Deposition

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