Direct feature extraction from two-dimensional X-ray diffraction images of semiconductor thin films for fabrication analysis-Reference-Cited by-同舟云学术

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Direct feature extraction from two-dimensional X-ray diffraction images of semiconductor thin films for fabrication analysis

Published:2022-03-01 Issue:1 Volume:2 Page:23-37
ISSN:2766-0400
Container-title:Science and Technology of Advanced Materials: Methods
language:en
Short-container-title:Science and Technology of Advanced Materials: Methods

Author:

Yamashita Akihiro¹²^ORCID,Nagata Takahiro³^ORCID,Yagyu Shinjiro³^ORCID,Asahi Toru¹,Chikyow Toyohiro²^ORCID

Affiliation:

1. Department of Advanced Science and Engineering, Waseda University, Tokyo, Japan

2. Research and Services Division of Materials Data and Integrated System, National Institute for Materials Science, Tsukuba, Japan

3. Research Center for Functional Materials, National Institute for Materials Science, Tsukuba, Japan

Funder

Japan Science and Technology Agency

Publisher

Informa UK Limited

Subject

General Medicine

Link

https://www.tandfonline.com/doi/pdf/10.1080/27660400.2022.2029222

Reference38 articles.

1. Enumeration of 166 Billion Organic Small Molecules in the Chemical Universe Database GDB-17

2. A mobile robotic chemist

3. Combinatorial Fabrication and Characterization of Ternary La2O3–Mn2O3–Co3O4Composition Spreads

4. Fabrication of three-component composition spread thin film with controlled composition and thickness

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