Development of FBG probes for dimensional metrology with micro parts of high aspect ratio
Author:
Publisher
Informa UK Limited
Subject
Atomic and Molecular Physics, and Optics
Link
http://www.tandfonline.com/doi/pdf/10.1080/09500340.2013.873085
Reference20 articles.
1. Form measurements of micro-holes
2. Fiber deflection probing method based on micro focal-length collimation
3. Optical fiber probe based on spherical coupling of light energy for inner-dimension measurement of microstructures with high aspect ratios
4. Opto-tactile probe based on spherical coupling for inner dimension measurement
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