Small-angle measurement in laser autocollimation based on a common-path compensation method-Reference-Cited by-同舟云学术

Small-angle measurement in laser autocollimation based on a common-path compensation method

Published:2019-10-13 Issue:18 Volume:66 Page:1818-1826
ISSN:0950-0340
Container-title:Journal of Modern Optics
language:en
Short-container-title:Journal of Modern Optics

Author:

Guo Yan¹²,Cheng Haobo¹²,Wen Yongfu¹²,Wu Hengyu¹²,Wu Yumin¹²

Affiliation:

1. Joint Research Center for Optomechatronics Engineering, School of Optics and Photonics, Beijing Institute of Technology, Beijing, People’s Republic of China

2. Shenzhen Research Institute, Beijing Institute of Technology, Shenzhen, People’s Republic of China

Publisher

Informa UK Limited

Subject

Atomic and Molecular Physics, and Optics

Link

https://www.tandfonline.com/doi/pdf/10.1080/09500340.2019.1677954

Reference23 articles.

1. Ultra-precise characterization of LCLS hard X-ray focusing mirrors by high resolution slope measuring deflectometry

2. CCD-area-based autocollimator for precision small-angle measurement

3. Recent developments and challenges of nanopositioning and nanomeasuring technology

4. A novel technique for calibration of polygon angles with non-integer subdivision of indexing table

5. New optical method for measuring small-angle rotations

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