Micro-three dimensional shape measurement method based on shadow Moiré using scanning electron microscopy
Author:
Publisher
Informa UK Limited
Subject
Atomic and Molecular Physics, and Optics
Link
http://www.tandfonline.com/doi/pdf/10.1080/09500340600809285
Reference12 articles.
1. Goldstein, JI. 1981.Scanning Electron Microscopy and X-Ray Microanalysis, 1–203. New York: Plenum Press.
2. Reimer, L. 1984.Transmission Electron Microscopy, 1–133. Berlin/Heidelberg: Springer-Verlag.
3. Generation of Surface Contours by Moiré Patterns
4. Moiré Topography
5. Malacara, D. 1992.Optical Shop Testing, 2nd, 653–685. New York: John Wiley & Sons.
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