Surface shape measurement of mirrors in the form of rotation figures by using point diffraction interferometer

Author:

Malyshev I. V.,Chkhalo N. I.,Akhsahalian A. D.,Toropov M. N.,Salashchenko N. N.,Pariev D. E.

Funder

Russian-German Scientific Foundations

Russian Foundation for Basic Research

Publisher

Informa UK Limited

Subject

Atomic and Molecular Physics, and Optics

Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. High-aperture low-coherence interferometer with a diffraction reference wave;Optics Letters;2022-07-08

2. Analysis of Electromechanical Deformation of a MEMS Element of a Reflection-Type Dynamic Mask Based on a Torsional Micromirror;2022 IEEE 23rd International Conference of Young Professionals in Electron Devices and Materials (EDM);2022-06-30

3. Heterodyne Near Field Speckles: from laser light to X-rays;Advances in Physics: X;2021-01-01

4. Multilayer X-Ray Image-Forming Optics;Bulletin of the Russian Academy of Sciences: Physics;2019-02

5. Current State of Development of a Microscope Operating at a Wavelength of 3.37 nm at the Institute of Physics of Microstructures of the Russian Academy of Sciences;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2018-11

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