1. School of Electrical Engineering, Suranaree University of Technology, Nakhon Ratchasima, Thailand
2. Research Network NANOTEC-SUT on Advanced Nanomaterials and Characterization, School of Electrical Engineering, Suranaree University of Technology, Nakhon Ratchasima, Thailand
3. BL6a: Deep X-ray Lithography, Synchrotron Light Research Institute (Public Organization), Nakhon Ratchasima, Thailand