Kinetic Study of Tetrakis(Dimethylamido)Titanium and Titanium Tetrachloride Adsorption on a Silicon Surface in Atomic Layer Deposition: A DFT Calculation
Author:
Affiliation:
1. Department of Physics, Faculty of Science, Burapha University, Chonburi, Thailand
2. Faculty of Science at Si Racha, Kasetsart University, Chonburi, Thailand
Publisher
Informa UK Limited
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials
Link
https://www.tandfonline.com/doi/pdf/10.1080/10584587.2022.2054059
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